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A near-field scanning microwave microscope in a scanning electron microscope: design and challenges.

Authors: Polovodov, P.; Eliet, Sophie; Haenssler, O.; Dambrine, Gilles; Haddadi, Kamel; Theron, Didier;

A near-field scanning microwave microscope in a scanning electron microscope: design and challenges.

Abstract

We present a Scanning Electron and Microwave Microscopy (SEMM) that is a combination of complementary microscopy techniques. The SEMM namely combines Atomic Force Microscopy (AFM), Scanning Electron Microscopy and Vector Network Analysis (VNA). Combination of multiple modes allows cross correlation of imaging techniques that may be useful for investigating materials at the nanoscale.

Country
France
Keywords

[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

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This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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