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IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
Article . 2009 . Peer-reviewed
License: IEEE Copyright
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Article . 2009
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Su-8-based nanocomposites for acoustical matching layer

Authors: Wang, S.; Campistron, Pierre; Carlier, Julien; Debavelaere-Callens, Dorothée; Nongaillard, Bertrand; Ndieguene, Assane; Nassar, Georges; +2 Authors

Su-8-based nanocomposites for acoustical matching layer

Abstract

SU-8, an epoxy-based photoresist, was introduced as the acoustical matching layer between silicon and water for lab-on-chip applications integrating acoustic characterization. Acoustical performances, including the acoustic longitudinal wave velocity and attenuation of the SU-8-based matching layer, were characterized at a frequency of 1 GHz at room temperature. The gain in echo characterization with a SU-8/SiO2 bilayer and with different nanocomposite monolayers made of SU-8 and TiO2 nanoparticles (size around 35 nm) between silicon and water was characterized as being above 10 dB in each case. With the increase of concentration of TiO2 in SU-8 based composites from 0 to 30 wt%, acoustical impedance of the nanocomposites increased from about 3 to 6 MRayls, respectively. The acoustical attenuation in the nanocomposites is between 0.5 and 0.6 dB/microm. The most efficient matching was obtained with the nanocomposite integrating 30 wt% TiO2 nanoparticles, with which the enhanced loss is about 0.34 dB as the attenuation is about 0.5 dB/microm. This type of matching layer has potential applications in lab-on-chip technology for high frequency transducers or in the fabrication of high frequency piezocomposites.

Country
France
Keywords

Silicon, [SPI] Engineering Sciences [physics], Polymers, Transducers, Nanocomposites, Acoustic applications, Electric Impedance, Titanium, Temperature, Attenuation, Impedance, Frequency, Acoustics, Micro-Electrical-Mechanical Systems, Silicon Dioxide, Resists, Acoustic waves, Models, Chemical, Nanoparticles, Epoxy Compounds, Algorithms, Biotechnology

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
26
Top 10%
Top 10%
Top 10%
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