Highly-transparent carrier-selective front contacts open a pathway towards entirely dopant free Si solar cells. Hole selective a-Si:H/MoOx/ITO front contact stacks were already successfully applied in such novel devices. However, for optimum device performance, further improvements are required: We evaluate the use of the high-work-function material WOX as a replacement for MoOx in an attempt to reduce optical absorption losses. In addition, we investigate the use of thin hydrogenated SiOX instead of a-Si:H, and the impact of the residual pressure for MoOx evaporation.