Perovskite and perovskite related oxides are important materials with applications ranging from solid oxide fuel cells, electronics, batteries and high temperature superconductors. The investigation of physical properties at the atomic scale such as self-diffusion is important to further improve and/or miniaturize electronic or energy related devices. In the present review we examine the oxygen self-diffusion and defect processes in perovskite and perovskite related oxides. This contribution is not meant to be an exhaustive review of the literature but rather aims to highlight the important mechanisms and ways to tune self-diffusion in this important class of energy materials.