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MEMS for Photonic Integrated Circuits

descriptionPublicationkeyboard_double_arrow_right Article , Conference object , Preprint 01 Mar 2020Embargo end date: 01 Jan 2022 Sweden Publisher:Institute of Electrical and Electronics Engineers (IEEE)Journal:IEEE Journal of Selected Topics in Quantum Electronics, volume 26, pages 1-16 (issn: 1077-260X, eissn: 1558-4542,

Authors: Carlos Errando-Herranz; Alain Yuji Takabayashi; Pierre Edinger; Hamed Sattari; Kristinn B. Gylfason; Niels Quack;

doi: 10.1109/jstqe.2019.2943384 , 10.48550/arxiv.2212.05169

arXiv: http://arxiv.org/abs/2212.05169

MEMS for Photonic Integrated Circuits

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Abstract

The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.

Country

Sweden

Related Organizations

Royal Institute of Technology
Sweden
École Polytechnique Fédérale de Lausanne EPFL
Switzerland

Keywords

Micromechanical devices, Nonlinear optics, photonics, FOS: Physical sciences, Applied Physics (physics.app-ph), Tuning, photonic integrated circuits, Annan elektroteknik och elektronik, Other Electrical Engineering, Electronic Engineering, Information Engineering, silicon photonics, PIC, Integrated optics, Physics - Applied Physics, Optical waveguides, MEMS, Optical variables control, integrated optics, nanophotonics, Microelectromechanical systems, Optical refraction, nanoelectromechanical systems, Physics - Optics, Optics (physics.optics)

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	influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	Top 10%
	impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.	Top 1%