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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao https://doi.org/10.1...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
https://doi.org/10.1103/physre...
Article . 1995 . Peer-reviewed
License: APS Licenses for Journal Article Re-use
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Negative ions in a radio-frequency oxygen plasma

Authors: , Stoffels; , Stoffels; , Vender; , Kando; , Kroesen; , de Hoog FJ;

Negative ions in a radio-frequency oxygen plasma

Abstract

A systematic study of a low pressure (5--200 mTorr) oxygen discharge is presented. Measurements of the electron and negative ion densities in the 13.56 MHz capacitively coupled plasma are performed by means of a microwave resonance technique in combination with photodetachment. A kinetic model is developed, incorporating volume and wall reactions of ions as well as neutral species. It is shown, by matching the experimental results with the model, that the dominant ion is ${\mathrm{O}}^{\mathrm{\ensuremath{-}}}$ whereas the ${\mathrm{O}}_{2}^{\mathrm{\ensuremath{-}}}$ and ${\mathrm{O}}_{3}^{\mathrm{\ensuremath{-}}}$ densities reach 10 to 20 % of the total negative ion density. The ratio of negative ion to electron density varies between 5 and 10 and decreases with pressure and rf power. The total negative ion density is about 5\ifmmode\times\else\texttimes\fi{}${10}^{15}$ ${\mathrm{m}}^{\mathrm{\ensuremath{-}}3}$, it increases with gas flow, is independent of the rf input power, and has a maximum at a pressure of 30 mTorr. The agreement between the measurements and the model is within the experimental error for a wide range of conditions. Deviations are explained by changes in the gas and wall temperatures. From the known ion density the effective ionization rate has been determined and related to the electron temperature. The ionization temperature obtained in this way varies between 2 and 4 eV and decreases with increasing gas pressure and power, as expected for the bulk electron temperature in this type of discharge.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
163
Top 10%
Top 1%
Top 10%
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