
doi: 10.1063/1.4870536 , 10.34657/1649
n-type binary compound semiconductors such as InN, InAs, or In2O3 are especial because the branch-point energy or charge neutrality level lies within the conduction band. Their tendency to form a surface electron accumulation layer prevents the formation of rectifying Schottky contacts. Utilizing a reactive sputtering process in an oxygen-containing atmosphere, we demonstrate Schottky barrier diodes on indium oxide thin films with rectifying properties being sufficient for space charge layer spectroscopy. Conventional non-reactive sputtering resulted in ohmic contacts. We compare the rectification of Pt, Pd, and Au Schottky contacts on In2O3 and discuss temperature-dependent current-voltage characteristics of Pt/In2O3 in detail. The results substantiate the picture of oxygen vacancies being the source of electrons accumulating at the surface, however, the position of the charge neutrality level and/or the prediction of Schottky barrier heights from it are questioned.
Sputter, Physics, QC1-999, Thin films, ddc:530, Electronic bandstructure, Ozon, Schottky-Barriere, Indiumoxid, Complex analysis, Transition metals, 530, deposition, Crystallographic defects, Electrostatics, Chemical elements, Ozone, Schottky barriers, indium oxide, Metal to metal contacts, Schottky contacts, info:eu-repo/classification/ddc/530, TP248.13-248.65, Ohmic contacts, Biotechnology
Sputter, Physics, QC1-999, Thin films, ddc:530, Electronic bandstructure, Ozon, Schottky-Barriere, Indiumoxid, Complex analysis, Transition metals, 530, deposition, Crystallographic defects, Electrostatics, Chemical elements, Ozone, Schottky barriers, indium oxide, Metal to metal contacts, Schottky contacts, info:eu-repo/classification/ddc/530, TP248.13-248.65, Ohmic contacts, Biotechnology
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