
A review of excimer laser systems is presented, including basic physical data, technology, performances and applications. The last few years have seen a rapid development of this new type of gas lasers and of many commercial systems producing efficient high power pulses of ultra-violet radiation. After a short recall of physical principles, we give a description of the internal structure of nanosecond and picosecond excimer lasers, followed by the analysis of principal beam characteristics : output power, efficiency, pulse stability, beam profile and lifetime. Some cost considerations are also examined. The presentation of principal applications in various domains as photochemistry, material processing, non linear processes and medecine, shows how these lasers are definitely an useful tool.
[PHYS.HIST] Physics [physics]/Physics archives
[PHYS.HIST] Physics [physics]/Physics archives
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 0 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |
