Inline Plasma Analysis as Tool for Process Monitoring in Laser Micro Machining for Multi-layer Materials
Copyright policy )Inline Plasma Analysis as Tool for Process Monitoring in Laser Micro Machining for Multi-layer Materials
Laser Assisted Net Shape Engineering : 9 International Conference on Photonic Technologies : Proceedings of the LANE 2016 September 19-22, 2016 Fürth, Germany / Edited by M. Schmidt, F. Vollertsen and C. B. Arnold 9 International Conference on Photonic Technologies, Fürth, Germany, 19 Sep 2016 - 22 Sep 2016; Amsterdam [u.a.] : Elsevier, Physics procedia, 83, 1329-1338 (2016). doi:10.1016/j.phpro.2016.08.140
Published by Elsevier, Amsterdam [u.a.]
- Fraunhofer Society Germany
- RWTH Aachen University Germany
- Fraunhofer Institute for Production Technology Germany
real-time feedback, plasma analysis, in-line metrology, Laser induced breakdown spectroscopy, Physics and Astronomy(all), info:eu-repo/classification/ddc/530, laser emission spectroscopy, 530
real-time feedback, plasma analysis, in-line metrology, Laser induced breakdown spectroscopy, Physics and Astronomy(all), info:eu-repo/classification/ddc/530, laser emission spectroscopy, 530
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