Nonlinear Displacement of the Electrothermal V‐Shaped Actuator
Copyright policy )Nonlinear Displacement of the Electrothermal V‐Shaped Actuator
This article proposes a formula for calculating the nonlinear displacement of the electrothermal V‐shaped actuator aims to determine more accurately its displacement. The nonlinear displacement model is established based on the axial deformation of V‐beams with two fixed ends. Hence, the theoretical displacements of a particular V‐shaped actuator (i.e. dimension as beam length of 750 μm; beam width of 6 μm; beam thickness of 30 μm; inclined angle of 2°) are compared with the simulation and experimental results. The evaluation shows that our calculation error compared with the simulation and experiment is less than 5% and 12.4%, respectively. This confirmed the advantages of the proposed formula according to the nonlinear displacement model. This work provides a theoretical model for predicting more precisely the displacement of a V‐shaped actuator. The advantage of this model is that it will significantly reduce the time in the design and trial manufacturing process.
Iterative Learning Control in Engineering Practice, Artificial intelligence, QC1-999, FOS: Mechanical engineering, Structural engineering, Control (management), Quantum mechanics, Control Issues in Nanopositioning Systems, Microelectromechanical Systems, Engineering, Displacement (psychology), Actuator, FOS: Electrical engineering, electronic engineering, information engineering, Control theory (sociology), Psychology, Electrical and Electronic Engineering, Physics, Piezoelectric Actuators, Thermal Behavior, Computer science, Materials science, Mechanical engineering, FOS: Psychology, Control and Systems Engineering, High-Speed Micro/Nanomanipulation, Electrical engineering, Physical Sciences, Flexure-Based Mechanisms, Nonlinear system, Psychotherapist, Nonlinear Systems
Iterative Learning Control in Engineering Practice, Artificial intelligence, QC1-999, FOS: Mechanical engineering, Structural engineering, Control (management), Quantum mechanics, Control Issues in Nanopositioning Systems, Microelectromechanical Systems, Engineering, Displacement (psychology), Actuator, FOS: Electrical engineering, electronic engineering, information engineering, Control theory (sociology), Psychology, Electrical and Electronic Engineering, Physics, Piezoelectric Actuators, Thermal Behavior, Computer science, Materials science, Mechanical engineering, FOS: Psychology, Control and Systems Engineering, High-Speed Micro/Nanomanipulation, Electrical engineering, Physical Sciences, Flexure-Based Mechanisms, Nonlinear system, Psychotherapist, Nonlinear Systems
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