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ZENODO
Other literature type . 2023
License: CC BY
Data sources: Datacite
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ZENODO
Other literature type . 2023
License: CC BY
Data sources: Datacite
image/svg+xml art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos Open Access logo, converted into svg, designed by PLoS. This version with transparent background. http://commons.wikimedia.org/wiki/File:Open_Access_logo_PLoS_white.svg art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos http://www.plos.org/
ZENODO
Other literature type . 2023
License: CC BY
Data sources: ZENODO
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Etching SiO2 without HF

descriptionPublicationkeyboard_double_arrow_right Other literature type 25 Feb 2023 English Publisher:Zenodo
Authors: Thomas Pucher; Yu Kyoung Ryu; Andres Castellanos-Gomez;

doi: 10.5281/zenodo.7677638 , 10.5281/zenodo.7677639

Etching SiO2 without HF

Abstract

In this technical note we share our experience etching SiO2 in SiO2/Si wafers without using hydrofluoric acid (HF). We have been using glass etching cream (in particular Armour Etch) which relaxes the safety when performing this etching process substantially.

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Keywords

glass etching cream, clean room, micro-fabrication, Armour Etch, silicon oxide etching

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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