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ZENODO
Dataset . 2023
License: CC BY
Data sources: Datacite
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ZENODO
Dataset . 2023
License: CC BY
Data sources: ZENODO
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ZENODO
Dataset . 2023
License: CC BY
Data sources: Datacite
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Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography (Data)

Research datakeyboard_double_arrow_right Dataset 10 Feb 2023Publisher:Zenodo
Authors: Fahrbach, Michael; Xu, Min; Nyang'au, Wilson Ombati; Domanov, Oleg; Schwalb, Christian H.; Li, Zhi; Kuhlmann, Christian; +2 Authors

doi: 10.5281/zenodo.7627017 , 10.5281/zenodo.7627016

Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography (Data)

Abstract

This research is funded by the EMPIR 17IND05 MicroProbes and 19ENG05 NanoWires projects. The projects 17IND05 MicroProbes and 19ENG05 NanoWires have received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program.

Raw data and figures used for the article "Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography", published in Sensors 2023, 23(4), 2003.

Related Organizations
Keywords

tactile surface scanning, high-throughput metrology, piezoresistive cantilever, resonance frequency, quality factor, contact mode

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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