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In this document we share: -the XRD in-plane scans acquired on Cu/W multilayers at different incidence angle, -the in-situ stress curvature data acquired during multilayer growth, -the in plane d-spacing derived at different incidence angle, used for the simulation of the strain gradient.
in-situ stress curvature, strain gradient, residual stress, XRD on multilayers, in-plane diffraction
in-situ stress curvature, strain gradient, residual stress, XRD on multilayers, in-plane diffraction
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