Deterministically fabricated spectrally-tunable quantum dot based single-photon source Spectrally-tunable quantum light sources are key elements for the realization of long-distance quantum communication. A deterministically fabricated single-photon source with a photon extraction efficiency of η =(20 ± 2) %, a maximum tuning range of ΔE = 2.5 meV and a minimum g(2)(τ = 0) = 0.03 ± 0.02 is presented. The device consists of a single pre-selected quantum dot (QD) monolithically integrated into a microlens that is bonded onto a piezoelectric actuator via gold thermocompression bonding. Here, a thin gold layer simultaneously provides strain transfer and acts as a backside mirror for the QD-microlens to maximize the photon extraction efficiency. The QD-microlens structure is patterned via 3D in-situ electron-beam lithography (EBL), which allows us to pre-select and integrate suitable QDs based on their emission intensity and energy with a spectral accuracy of 1 meV for the final device. Together with strain fine-tuning, this enables the scalable realization of single-photon sources with identical emission energy. Moreover, we show that the emission energy of the source can be stabilized to µeV accuracy by closed-loop optical feedback. Thus, the combination of deterministic fabrication, spectral-tunability and high broadband photon-extraction efficiency makes the QD-microlens single-photon source an interesting building block for the realization of quantum communication networks.

This work was supported by the Joint Research Project SIQUST (17FUN06). This project received funding from the European Metrology Programme for Innovation and Research (EMPIR) cofinanced by the Participating States and from the European Unions Horizon 2020 research and innovation programme.