
This record contains the ALD/E Neuro-symbolic Query Dataset, a curated collection of 33 scientific queries (19 ALD, 14 ALE) defined over machine-actionable Open Research Knowledge Graph (ORKG) comparisons extracted from published review tables. Each query bundle includes: a natural-language question (brief + detailed forms), the corresponding SPARQL gold-standard query, CSV exports of the underlying ORKG comparison tables, symbolic results (results_SPARQL.csv), neural and symbolic-context-augmented results from 21 language-model systems, machine-readable metadata linking to the source paper, DOI, ORKG comparison IDs, and query type. The dataset supports research in NL→SPARQL translation, scientific table QA, symbolic vs neural vs neurosymbolic evaluation, and reproducible meta-analysis of ALD/E processes.It also includes domain-expert survey assessments of query clarity and result quality. The resource is intended for materials scientists seeking FAIR, queryable ALD/E knowledge, and for AI researchers developing models that connect natural-language questions with graph-structured scientific evidence.
Artificial intelligence, atomic layer etching, Artificial Intelligence, Generative AI, atomic layer deposition, Materials Science, neurosymbolic AI, Knowledge Graphs, SPARQL, Materials science
Artificial intelligence, atomic layer etching, Artificial Intelligence, Generative AI, atomic layer deposition, Materials Science, neurosymbolic AI, Knowledge Graphs, SPARQL, Materials science
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 0 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |
