This data publication contains the results of nanoindentation tests on Fused silica, nanocrystalline nickel, a nanocrystalline FeCr alloy, a bulk metallic glass, the superplastic alloy Zn-22%Al and single crystalline aluminum as well as the method files developed for the G200 nanoindenter. It supplements the publication "Novel nanoindentation strain rate sweep method for continuously investigating the strain rate sensitivity of materials at the nanoscale". The materials are described in more detail in the respective publication. The data publication takes over the sample naming convention from the related publication. Nanoindentation measurement were performed by H. Holz at the Max-Planck Institut für Eisenforschung GmbH, Max-Planck-Straße 1, 40237 Düsseldorf, Germany using a G200 nanoindenter (KLA, Milpitas, CA, USA), equipped with a modified Berkovich diamond indenter tip of the type 171-561-500 with a serial number of C-0040446 from Synton MDP (Nidau, Switzerland). Constant strain rate tests, strain rate jump tests, strain rate sweep tests and strain rate sweep reversal tests were performed on each material in Continuous Stiffness Measurement (CSM) mode. The maximum indentation depth was 2200 nm, the CSM amplitude 2 nm and the CSM frequency 45 Hz. Strain rates were varied within the range 0.001 – 0.1 s-1. Further information on the test protocol can be found in the corresponding publication. The subfolder "Nanoindentation data" contains the raw data for all valid indents as output by the NanoSuite © software v 7.1.7 and converted to the semicolon-separated format. The naming convention for the folder in which the CSV files are located in gives first the used material, then the method used with additional information to the parameters inputted for the method such as strain rate and indentation depth all separated by an underscore. An example can be "FS_CSR_01s-1" for a constant strain rate tests performed on fused silica with a strain rate target of 0.1 s-1 or "Nc-Ni_SweepReversal_005s-1_0005s-1" for a sweep reversal test performed on the nanocrystalline nickel sample with a targeted initial and ending strain rate of 0.05 s-1 and a strain rate target at which the strain rate direction gets reversed of 0.005 s-1. The CSV files are named either "Results" giving the average results of each test, "Required Inputs" giving information about the parameters used for the experiments, "Inputs Editable Post Test" giving information about the analysis parameters to obtain the results from, and "Test XXX" which include the Raw data of the corresponding test number. In each file the first row gives the data description e.g., "Time", the second row the physical unit e.g., "s" for seconds and from the third row the measured values. The Nano Suite method files to perform the experiments on KLA G200 instruments is provided in the folder "G200 methods". The method for the strain rate sweep experiments is called "Strain Rate Sweep.msm" and the method for the strain rate sweep reversal experiments "Strain Rate Sweep Reversal.msm". This method is provided as is and shall be used at your own risk. The authors explicitly decline responsibility for any physical or immaterial damage resulting from the use of this method. Should minor issues occur, some feedback to the authors would be greatly appreciated.