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Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films

Authors: Mindaugas Andrulevičius; Evgenii Artiukh; Gunnar Suchaneck; Sitao Wang; Nikolai A. Sobolev; Gerald Gerlach; Asta Tamulevičienė; +2 Authors

Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films

Abstract

X-ray photoelectron spectroscopy was used to study the direct synthesis of strontium and molybdenum oxide thin films deposited by multitarget reactive magnetron sputtering (MT-RMS). Sr and Mo targets with a purity of 99.9% and 99.5%, respectively, were co-sputtered in an argon–oxygen gas mixture. The chamber was provided with an oxygen background flow plus an additional controlled oxygen supply to each of the targets. We demonstrate that variation in the power applied to the Mo target during MT-RMS enables the production of strontium and molybdenum oxide films with variable concentrations of Mo atoms. Both molybdenum and strontium were found in the oxidized state, and no metallic peaks were detected. The deconvoluted high-resolution XPS spectra of molybdenum revealed the presence of several Mo 3d peaks, which indicates molybdenum bonds in a lower valence state. Contrary to the Mo spectra, the high-resolution strontium Sr 3d spectra for the same samples were very similar, and no additional peaks were detected.

Keywords

multitarget reactive magnetron sputtering, X-ray photoelectron spectroscopy, strontium molybdate, strontium molybdate; multitarget reactive magnetron sputtering; X-ray photoelectron spectroscopy, Article

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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