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High sensitive, linear and thermostable pressure sensor utilizing bipolar junction transistor for 5 kPa

descriptionPublicationkeyboard_double_arrow_right Article , Preprint 16 Apr 2021Publisher:Center for Open ScienceJournal:Physica Scripta, volume 96, page 65,705 (issn: 0031-8949, eissn: 1402-4896, Copyright policy )
Authors: Mikhail Basov;

doi: 10.31219/osf.io/5pjf9 , 10.1088/1402-4896/abf536 , 10.21203/rs.3.rs-677110/v1 , 10.36227/techrxiv.14891670.v1 , 10.36227/techrxiv.14891670

High sensitive, linear and thermostable pressure sensor utilizing bipolar junction transistor for 5 kPa

Abstract

Research of pressure sensor chip utilizing novel electrical circuit with bipolar-junction transistor-based (BJT) piezosensitive differential amplifier with negative feedback loop (PDA-NFL) for 5 kPa differential range was done. The significant advantages of developed chip PDA-NFL in the comparative analysis of advanced pressure sensor analogs, which are using the Wheatstone piezoresistive bridge, are clearly shown. The experimental results prove that pressure sensor chip PDA-NFL with 4.0 × 4.0 mm2 chip area has sensitivity S = 11.2 ± 1.8 mV/V/kPa with nonlinearity of 2KNLback = 0.11 ± 0.09%/FS (pressure is applied from the back side of pressure sensor chip) and 2KNLtop = 0.18 ± 0.09%/FS (pressure is applied from the top side of pressure sensor chip). All temperature characteristics have low errors, because the precision elements balance of PDA-NFL electric circuit was used. Additionally, the burst pressure is 80 times higher than the working range.

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Electronic Devices and Semiconductor Manufacturing, Engineering, Electrical and Electronics, Automotive Engineering, Aerospace Engineering, Electrical and Computer Engineering

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citations
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BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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