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AbstractAtomic layer deposition (ALD) is a thin film growth technique based on the repeated use of separate, saturating gas‐solid reactions. The principle of ALD has been discovered twice; in the 1960s under the name “molecular layering” in the Soviet Union, and in the 1970s under the name “atomic layer epitaxy” (ALE) in Finland. In 2014, it is forty years since the filing of the worldwide patent on ALE as a method for the growth of compound thin films. This essay celebrates the fortieth anniversary of ALE‐ALD, briefly telling the story of ALE as shared by its Finnish inventor, Dr. Tuomo Suntola. Initially, ALE was aimed at the growth of high‐quality polycrystalline ZnS thin films for electroluminescent (EL) display panels. Gradually, the material selection of ALE increased, and the application areas were extended to photovoltaics, catalysis, semiconductor devices, and beyond. Fast, production‐worthy ALE reactors were imperative for industrial success. The unprejudiced creation of new technologies and products with ALE, initiated by Dr. Tuomo Suntola and led by him until early 1998, are an integral part of the Finnish industrial history, the fruits of which are seen today in numerous applications worldwide.
ta114, ta213, VPHA, atomic layer epitaxy, EL displays, ZnS, ALD, atomic layer deposition, Virtual Project on the History of ALD, and Infrastructure, history, SDG 7 - Affordable and Clean Energy, Innovation, SDG 9 - Industry
ta114, ta213, VPHA, atomic layer epitaxy, EL displays, ZnS, ALD, atomic layer deposition, Virtual Project on the History of ALD, and Infrastructure, history, SDG 7 - Affordable and Clean Energy, Innovation, SDG 9 - Industry
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 206 | |
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