CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers

Huchuan Zhou; P. Kropelnicki; Julius Minglin Tsai; Chengkuo Lee

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https://doi.org/10.1109/memsys...

Article . 2013 . Peer-reviewed

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https://dx.doi.org/10.1109/mem...

Article

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CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers

descriptionPublicationkeyboard_double_arrow_right Article 01 Jan 2013Publisher:IEEEJournal:2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

Authors: Huchuan Zhou; P. Kropelnicki; Julius Minglin Tsai; Chengkuo Lee;

doi: 10.1109/memsys.2013.6474270

CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers

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Abstract

An infrared sensor based on a vertically integrated double layer (VIDL) thermopile which comprises of 96 thermocouples on a suspended membrane has been designed and fabricated by a CMOS-compatible process. The properties of this thermopile are characterized. The responsivity (Rs) of the VIDL thermopile is 202.8V/W and the detectivity (D*) of it is 2.85×108 cmHz1/2 W-1.

Related Organizations

National University of Singapore
Singapore
Institute of Microelectronics
Singapore
Agency for Science, Technology and Research
Singapore

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