Powered by OpenAIRE graph
Found an issue? Give us feedback
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao ACS Applied Material...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
ACS Applied Materials & Interfaces
Article . 2020 . Peer-reviewed
License: STM Policy #29
Data sources: Crossref
versions View all 2 versions
addClaim

This Research product is the result of merged Research products in OpenAIRE.

You have already added 0 works in your ORCID record related to the merged Research product.

Sub-10 nm Nanolaminated Al2O3/HfO2 Coatings for Long-Term Stability of Cu Plasmonic Nanodisks in Physiological Environments

Authors: Monisha Gnanachandra Daniel; Junyeob Song; Seied Ali Safiabadi Tali; Xiaochuan Dai; Wei Zhou;

Sub-10 nm Nanolaminated Al2O3/HfO2 Coatings for Long-Term Stability of Cu Plasmonic Nanodisks in Physiological Environments

Abstract

By supporting localized plasmon modes, metal-based plasmonic nanostructures can confine optical fields at deep-subwavelength scale in various applications, such as biological and chemical sensing, nanoscale light emission, and solar energy harvesting. While Cu is a low-cost complementary metal oxide semiconductor (CMOS) compatible material, its poor chemical stability limits the use of Cu plasmonic nanodevices in corrosive biochemical aqueous environments. In this paper, we demonstrate that sub-10 nm Al2O3/HfO2 nanolaminated coatings can significantly extend the lifetime of Cu nanodisk arrays from ∼5 h to ∼180 days in the physiological environment of 1× phosphate-buffered saline (PBS) at 37 °C. Cu nanodisk arrays are fabricated using freestanding Au nanohole array films as the physical vapor deposition masks and sub-10 nm nanolaminated coatings composed of alternating Al2O3 and HfO2 nanolayers are grown on Cu nanodisk arrays by atomic layer deposition (ALD). Time-dependent optical extinction measurements of Cu nanodisk arrays are conducted in 1× solutions at 37 °C to investigate the anticorrosion performance for different pure and nanolaminated ALD coatings. We observe a linear relationship between the lifetime of Cu nanodisk arrays in 1× PBS at 37 °C and the nanolaminated coating thickness, and ∼1.3 nm nanolaminated coatings of ∼10 ALD cycles can extend the lifetime of Cu plasmonics up to ∼20 days. Furthermore, we find that the anticorrosion performance of Al2O3/HfO2 nanolaminated ALD coatings strongly depends on the processing and the geometric parameters, such as the annealing temperature and the nanolaminated backbone unit size.

Related Organizations
  • BIP!
    Impact byBIP!
    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    7
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Average
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Top 10%
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
7
Top 10%
Average
Top 10%
Upload OA version
Are you the author of this publication? Upload your Open Access version to Zenodo!
It’s fast and easy, just two clicks!