Well aligned TiO2 nanotube arrays have been synthesized via anodization in an NH4F and ethylene glycol electrolyte; the resulting carbon-entrained films were treated by oxygen and argon microwave plasma. It was found that as-prepared amorphous TiO2 nanotubes can be easily crystallized into anatase at temperature lower than 150 degrees C. Carbon can be effectively eliminated in oxygen plasma and a new secondary porosity was emerged. It was found such a porous film has obvious photovoltaic and hydrogen production enhancement under simulated solar irradiation compared with that crystallized in inert argon plasma. This phenomenon may be attributed to the improvement of light adsorption and its excellent capability of hole-electron separation derives from highly ordered nanoporous configurations.