The present work describes a systematic experimental investigation of a N2O hollow cathode discharge. The local electron mean energy and density have been determined with a double Langmuir probe. Fourier transform infrared spectroscopy and mass spectrometry have been employed for the measurement of the concentration of the stable species present in the discharge. N2O, N2, O2, and NO are always identified as the main constituents of the discharge plasma. In addition, NO2 is found for the first time in a glow discharge of nitrous oxide. As a plausible explanation, a reaction of NO with oxygen atoms adsorbed on the cathode walls is proposed, although homogeneous reactions of vibrationally excited species cannot be discarded. A model based on a reduced set of kinetic equations including electron dissociation, gas-phase reactions, and gas-surface processes can give a global account of the measured data for all the experimental conditions used. The results are discussed and, when possible, compared to previous works on other types of N2O glow discharges.© 1998 American Chemical Society

DGICYT of Spain (Projects PB94-128, PB95-0918-C03-02) and the Comunidad de Madrid (Project COR0031/94), EC (Contract ERBCHBGCT940551 and Project PL950099)

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