Micromachined methane sensor based on low resolution spectral modulation of IR absorption radiation

descriptionPublicationkeyboard_double_arrow_right Article 01 May 1998 Spain English Publisher:Elsevier BVJournal:Sensors and Actuators B: Chemical, volume 48, pages 305-307 (issn: 0925-4005,

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Authors: Silveira, Juan Pedro; Anguita, José Virgilio; Briones Fernández-Pola, Fernando; Grasdepot, F.; Bazin, A.;

doi: 10.1016/s0925-4005(98)00062-8

handle: 10261/34943

Micromachined methane sensor based on low resolution spectral modulation of IR absorption radiation

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Abstract

We present a new methane sensor based on infrared absorption at 3.3 μm. We have designed a modulable interferencial filter to achieve sufficient selectivity and to eliminate drift and changes on transmission of optical elements or IR light source emission. This microoptical device is fabricated using materials and processes available from silicon technology, thus assuring low production cost

This work was supported by the ESPRIT project 6374.

Peer reviewed

Country

Spain

Related Organizations

Spanish National Research Council
Spain

Keywords

Near infrared, Methane sensor, Infrared radiation

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