
doi: 10.5772/38394
handle: 10281/55803
The chapter deals with the chemical kinetics in the gas-phase of cold plasmas. After a section concerning cold plasmas and the modeling scheme of the chemical kinetics happening in their gas-phases, the text will focus on hydrocarbon plasma chemistry. After a general review of the chemical kinetic pattern, we discuss several features presenting applications to two main fields, carbon film deposition by radiofrequency low pressure plasmas (discussing a typical Plasma Enhanced Chemical Vapour Deposition process) and hydrogen reforming by atmospheric pressure plasmas.
cold plasmas, chemical kinetics
cold plasmas, chemical kinetics
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