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Wireless Sensor Network
Article . 2017 . Peer-reviewed
License: CC BY
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Wireless Sensor Network
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Damping Ratio Analysis of a Silicon Capacitive Micromechanical Accelerometer

Authors: Yuming Mo; Lianming Du; Bingbing Qu; Bo Peng; Jie Yang;

Damping Ratio Analysis of a Silicon Capacitive Micromechanical Accelerometer

Abstract

In most MEMS devices, the moving micro-structures are surrounded by air which significantly affects their dynamics behaviors. The correct prediction of the squeeze-film air damping ratio is essential in MEMS (Micro-Electro-Mechanical System) devices design. In the paper, a static test is proposed to measure the squeeze-film air damping ratios of capacitive MEMS accelerometer under different pressures. The unsealed chip of capacitive accelerometer is placed in vacuum extraction equipment and an open loop circuit is developed to apply step signal in the test. By charging the pressure and measuring the overshoot Mp and the settling time ts from the time response of the system, the damping ratio ξ under different pressures can be calculated. Finite element method (FEM) based on the modified Reynolds equation is utilized to simulate the transient response of the micro-structure. Good correlation between experiment and FEM analysis is obtained. The proposed static test in this paper provides a new method to more easily measure the dynamic performances of micro-structures under various pressures.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
4
Average
Top 10%
Average
gold