Three Cavity Tunable MEMS Fabry Perot Interferometer
Copyright policy )Three Cavity Tunable MEMS Fabry Perot Interferometer
In this paper a four-mirror tunable micro electro-mechanical systems (MEMS)Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. Thespectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018(nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the threecavity lengths). Two different cases were separately considered for the tuning. In case one,tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 weredeflected for the tuning of the FPI.
- Concordia University Wisconsin United States
- Concordia University Canada
IR Spectroscopy, MEMS, Full width Half Maximum, Chemical technology, Fabry Perot Interferometer, TP1-1185
IR Spectroscopy, MEMS, Full width Half Maximum, Chemical technology, Fabry Perot Interferometer, TP1-1185
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