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We report the growth of micrometer-sized In2O3 octahedral structures, which are next aligned in chains using dielectrophoresis on top of microhotplates with prepatterned electrodes and integrated heater to work as chemoresistive gas sensors. The devices are relatively fast (180 s), highly sensitive (response up to ~256%), and selective toward NO2 in humid environments, showing little response to O2 and ethanol, and being completely insensitive to CO and CH4. The here-presented fabrication method can be easily extended as a cost-effective post-process in CMOS-compatible microhotplate fabrication and, thus, represents a promising candidate for indoor and outdoor air quality monitoring devices.
Nanoteknik, nitrogen dioxide, humidity, Signalbehandling, gas sensor, microstructures, Signal Processing, Nano Technology, indium oxide
Nanoteknik, nitrogen dioxide, humidity, Signalbehandling, gas sensor, microstructures, Signal Processing, Nano Technology, indium oxide
citations This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 4 | |
popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Top 10% | |
influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |