Ground-based tests of Hg ion thrusters have identified sputter erosion of thruster components as one of the main life limiting phenomena. Subsequent measurements have revealed that sputtering rates can be affected by background gases at pressures as low as 10 to the -10th torr. With the recent interest in thin film technology, sputtering in the presence of reactive gases has been studied in great detail. This paper presents the results of many of those studies and applies them to the sputtering of electric thrusters. A model, which assumes that chemisorption is the dominant mechanism, is applied to the sputtering rate measurements of the screen grid of a 30-cm thruster in the presence of nitrogen. The model utilizes inputs from a variety of experimental and analytical sources. The model of environmental effects on sputtering was applied to thruster conditions of low discharge voltage and a discussion of the comparison of theory and experiment is presented.