In a photoelectron spectroscopy system, we have measured the spectra and the source diameter of laserinduced plasma soft x-rays. Furthermore, we have developed a TOF-XPS (Time of Flight-X-ray Photoelectron Spectroscopy) measuring system and obtained TOF-spectra with the x-rays. In an internal material measurement, we have developed a hard x-ray (below the wavelength of 0.1 nm) system, by focusing sub-nano second Nd: YAG laser pulses on a target supplying positive high voltage. We have also developed a DT (Digital Tomography) measuring system and obtained CT (Computed Tomography) and DT images with a micro-focus x-ray tube. In a high-sensitivity detection technology, we are developing technology for measuring the surface or sub-surface composition with high sensitivity by measuring photons (fluorescent x-rays) using a high energy-resolution superconducting x-ray detecting system.