
We propose a microtouch-sensor array applicable in high-temperature environments. PZT thin film was fabricated on a Ti substrate by a hydrothermal method and electrodes were deposited on it to form the sensor and actuator. The actuator is driven at a resonance frequency of 1.045 [kHz] and actuating voltage is low at ±5[V]. The sensor detects impedance change before and after contact. The sensor is simple and easy to miniaturize and works at temperature up to 82°C. This sensor can be used as an automobile control touch-sensor pad instead of conventional capacitive touch pads because it is robust against high temperature. We detail the sensor's basic features.
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