
doi: 10.1364/oe.499892
pmid: 38041277
An ultra-compact on-chip spectrometer was demonstrated based on an array of add-drop micro-donut resonators (MDRs). The filter array was thermally tuned by a single TiN microheater, enabling simultaneous spectral scanning across all physical channels. The MDR was designed to achieve large free spectral ranges with multimode waveguide bends and asymmetric coupling waveguides, covering a spectral range of 40 nm at the telecom waveband with five physical channels (which could be further expanded). Benefiting from the ultra-small device footprint of 150 µm2, the spectrometer achieved a low power consumption of 16 mW. Additionally, it is CMOS-compatible and enables mass fabrication, which may have potential applications in personal terminals and the consumer industry.
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