Aluminum layers protected with fluoride coatings have been deposited by evaporation and characterized with respect to their suitability as vacuum ultraviolet (VUV) mirrors. Optical characterization has been performed by spectrophotometry, while the surface quality of the layers has been judged by means of x ray reflection, scanning electron microscopy, and atomic force microscopy. In particular, protection with aluminum fluoride results in superior VUV reflection properties. VUV reflectance values between 80% and nearly 90% have been verified even two years after deposition and exposure to the atmosphere.