
The purpose of the present paper is to develop a piezoelectric screw-driven motor, which can be driven at low voltage. The motor consists of a cubic shaped stator and a rotor with external thread. The stator is formed by placing stacked piezoelectric actuators in the side hollowed cubic elastic body. Also, a threaded hole was designed in the stator and exactly fitting the screw rod to be pushed. The screw rod is forced to simultaneously rotate and translate by a traveling wave generated at the threaded hole due to a harmonic voltage signal is applied on the piezoelectric actuators. In the design processes of a screw-driven motor, the finite element analysis software ANSYS was used to analyze the vibration characteristics of the stator. In the experiment, the screw-driven motor prototype fabricated according to the designed results was measured. It showed that the translational speed of the screw-driven motor is 2.137 mm/s when applying 8 V pp without mechanical load. The translational speed of the motor is 1.174 mm/s with 16 g mechanical load under 8 V pp driving.
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