Design and analysis of complex nanophotonic and nanoelectronic structures require significant computing resources. Cloud computing infrastructure allows distributed parallel applications to achieve greater scalability and fault tolerance. The problems of effective use of high-performance computing systems for modeling and simulation of subwavelength diffraction gratings are considered. Rigorous coupled-wave analysis (RCWA) is adapted to cloud computing environment. In order to accomplish this, data flow of the RCWA is analyzed and CPU-intensive operations are converted to data-intensive operations. The generated data sets are structured in accordance with the requirements of MapReduce technology.