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Nanocrystalline Zinc-Oxide-Embedded Zirconium-Doped Hafnium Oxide for Nonvolatile Memories

Authors: Jiang Lu; Chen-Han Lin; Yue Kuo;

Nanocrystalline Zinc-Oxide-Embedded Zirconium-Doped Hafnium Oxide for Nonvolatile Memories

Abstract

Memory devices containing nanocrystalline ZnO-embedded Zr-doped HfO 2 high-k dielectric film have been prepared and characterized. The memory effect was manifested by the large counterclockwise capacitance-voltage hysteresis, e.g., 1.22 at ±6 V gate bias, and negative differential resistance region in the positive bias current-voltage range. The maximum trapped charge density of 6.43 X 10 12 cm -2 was obtained after -9 → + 9 → -9 V sweep voltage range. The memory effects were mainly caused by electron trapping at low bias voltage. A large memory operation window, e.g., 0.90 V, with a long charge-retention time, e.g., >36,000 s, was achieved under the proper gate-stress voltage. It is a viable dielectric for future nanosize metal-oxide-semiconductor field-effect transistors and capacitors.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
13
Average
Top 10%
Average
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