The kinetics of the thermal decomposition of germane were studied in a dynamic system. The effect of substrate temperature on growth rate in the range of 300°–450°C was investigated. The effect of germane concentration on the growth rate of germanium was also studied. The mole fraction of germane was varied from . The carrier and diluent were nitrogen. Both zero and first order reactions were observed. Activation energies were found to be 0.75 eV (17 kcal) and 1.20 eV (28 kcal) for the zero and first order reactions, respectively. The zero order is ascribed to a heterogeneous reaction while the first order is ascribed to a homogeneous reaction. Comparisons with results obtained from other studies are made.