ACOUSTIC WAVE DEVICE

Masakazu Mimura

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The Journal of the A...arrow_drop_down

The Journal of the Acoustical Society of America

Article . 2013 . Peer-reviewed

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https://dx.doi.org/10.1121/1.4...

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ACOUSTIC WAVE DEVICE

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Jan 2013 English Publisher:Acoustical Society of America (ASA)Journal:The Journal of the Acoustical Society of America, volume 133, page 1,849 (issn: 0001-4966,

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Authors: Masakazu Mimura;

doi: 10.1121/1.4795070

ACOUSTIC WAVE DEVICE

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Abstract

An acoustic wave device includes: a piezoelectric film made of an aluminum nitride film containing a divalent element and a tetravalent element, or a divalent element and a pentavalent element; and an electrode that excites an acoustic wave propagating through the piezoelectric film.

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