Acceleration sensor and measurement method

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Jan 1997 English Publisher:Acoustical Society of America (ASA)Journal:The Journal of the Acoustical Society of America, volume 102, page 2,477 (issn: 0001-4966,

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Authors: Jiri Marek;

doi: 10.1121/1.420436

Acceleration sensor and measurement method

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Abstract

An acceleration sensor has a seismic mass having movable electrodes. The movable electrodes are designed as differential capacitors between two fixed electrodes. Also provided are additional electrodes which are arranged opposite movable electrodes or opposite bending elements on which the seismic mass is suspended. Electrical voltages which are evaluated by the evaluation circuit as acceleration can be applied to the additional electrodes.

Related Organizations

Robert Bosch (Germany)
Germany

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