Surface acoustic wave device, filter device and method of producing the surface acoustic wave device

Masahiko Imai

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The Journal of the Acoustical Society of America

Article . 2006 . Peer-reviewed

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https://dx.doi.org/10.1121/1.2...

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Surface acoustic wave device, filter device and method of producing the surface acoustic wave device

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Jan 2006 English Publisher:Acoustical Society of America (ASA)Journal:The Journal of the Acoustical Society of America, volume 120, page 3,442 (issn: 0001-4966,

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Authors: Masahiko Imai;

doi: 10.1121/1.2409409

Surface acoustic wave device, filter device and method of producing the surface acoustic wave device

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Abstract

A surface acoustic wave device includes a piezoelectric substrate on which resonators having comb-like electrodes are formed; and a silicon substrate that is directly bonded to the piezoelectric substrate and is less expansive than the piezoelectric substrate, a cavity being formed in the silicon substrate and being located below at least one of the resonators.

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Fujitsu (Japan)
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