
doi: 10.1121/1.2212582
The present invention relates to a linear motor which draws its operating power from ultrasonic vibration above the frequency of 20 kHz which is generated by piezoelectric ceramic. More particularly, the invention relates to a linear piezoelectric ultrasonic motor which linearly operates a slider due to a frictional force generated by applying sinusoidal electric field with a 90 degree phase difference to a pair of piezoelectric ceramic. This causes an elliptical mechanical vibration on a shaking beam which is connected to the piezoelectric ceramic.
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