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Research on a novel MOEMS interferometric gyroscope

Authors: Huilan Liu; Lishuang Feng; Heng Lin; Chunxi Zhang;

Research on a novel MOEMS interferometric gyroscope

Abstract

MOEMS (Micro-Opto-Electro-Mechanical System) gyroscope is one of the research hotspot of international inertial domain. It combines advantages of optical detect principle of optical gyroscopes and MEMS (Micro-Electro-Mechanical System) fabrication technique. It is solid-state. It has little volume, light weight, good stability, and large dynamic scale. And it can be batch fabricated. These make it has large applications in inertial technology domain. A MOEMS interferometric gyroscope which uses spatial optical paths to sensitive Sagnac effect is presented. A spatial helical optical structure composed of micromirrors was designed. Light traveled in free space, which could reduce wastage. The gyroscope has no coupling problem, no back scatter, and no movable parts. The structure of the gyroscope has advantages in microminiaturization. It could be manufactured using MEMS technics. Theoretical analyses were made to parameters of the spatial optical path from the viewpoint of improving the fundamental detection limit. Theorem proving experiment was researched. Based on experiment design, output signals of the gyroscope on rotate platform were measured using Lock-in amplifier and other instruments. Theorem proving of the Sagnac effect is realized, and the bias stability of the gyroscope system is about 8 °/h.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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