High-speed nanometer lapping photonics elements

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 09 Feb 2005Publisher:SPIEJournal:SPIE Proceedings, volume 5,635, page 482 (issn: 0277-786X,

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Authors: Jiandong Yang; Qun Liu; Chunlin Tian;

doi: 10.1117/12.577984

High-speed nanometer lapping photonics elements

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Abstract

This paper discusses some problems about nanometer lapping photonics elements. The solid abrasives high speed lapping method and the theory of lapping tool wearing uniformly are used in machining photonics elements. It makes workpiece machined surface roughness reach to Ra0.88nm, flatness reach 19nm. That not only realizes nanometer machining, but also realizes machining at high efficiency and low cost.

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Changchun University of Science and Technology
China (People's Republic of)

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