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Thick SU-8 photolithography for BioMEMS

Authors: Marc Rabarot; Jacqueline Bablet; Marine Ruty; Matthieu Kipp; Isabelle Chartier; Christophe Dubarry;

Thick SU-8 photolithography for BioMEMS

Abstract

SU-8, negative-tone epoxy base, photoresist has a great potential for ultra-thick high aspect ratio structures in low cost micro-fabrication technologies. Commercial formulation of NanoTM SU-8 2075 is investigate, process limitations are discuss. Good layer uniformity (few %) for single layer up to 200 μm could be obtained in a covered RC8 (Suss-MicroTec) spin coater, but for ultra-thick microstructures it is also possible to cast on the wafer a volume controlled of resist up to 1.5 mm without barrier. Long baking times are necessary for a well process control. The layout of the photo-masks design and process parameters have great impact on residual stress effects and adhesion failures, especially for dense SU-8 patterns on metallic under layer deposited on silicon wafers. A specific treatment applied before the resist coating definitely solved this problem. Bio-fluidic applications of on-wafer direct prototyping (silicon, glass, plastics) are presented. An example will be given on prototyping dielectophorectic micro-cell manipulation component. The SU-8 fluidic structure is made by a self planarized multi-level process (application for 2,5 to 3D microstructures). Biotechnology applications of integrated micro-cells could be considered thanks to the SU-8 good resistance to PCR (Polymerase Chain Reaction). Future developments are focusing on the SU-8 capabilities for Deep Reactive Ion Etching of plastic and 3D shaping of microstructures using a process called : Multidirectional Inclined Exposure Lithography (MIEL).

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Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
8
Average
Top 10%
Average
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