Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications

Forbes R. Powell; Virginia A. Drake; Bill R. Sandel; Donald G. Mitchell

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https://doi.org/10.1117/12.185...

Article . 1994 . Peer-reviewed

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https://dx.doi.org/10.1117/12....

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Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 13 Sep 1994Publisher:SPIEJournal:SPIE Proceedings, volume 2,209, page 480 (issn: 0277-786X,

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Authors: Forbes R. Powell; Virginia A. Drake; Bill R. Sandel; Donald G. Mitchell;

doi: 10.1117/12.185281

Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications

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Abstract

This paper briefly reviews the more traditional materials that have been used for Soft X-Ray (SXR) and Extreme Ultraviolet (EUV) filters and then discusses several applications where new multilayer combinations of materials are being employed. The new applications include projection lithography and the detection of Energetic Neutral Atom (ENA) populations from spacecraft. Also briefly discussed is the use of polyimides for spacecraft filters.

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