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Fabrication of metallic nanoslit waveguides with sharp bends

Authors: M. Lu; L. E. Ocola; S. K. Gray; G. P. Wiederrecht;

Fabrication of metallic nanoslit waveguides with sharp bends

Abstract

Metallic nanoslit waveguides are promising candidates for ultrahigh-density optical interconnections. A variety of devices based on metallic nanoslit waveguides have already been proposed that show a great superiority over conventional photonic devices for compactness. However very few two-dimensional devices have been experimentally demonstrated with in-plane geometries due to fabrication difficulties. In this article, a feasible process is presented using traditional semiconductor fabrication technologies such as mix-and-match lithography and electroplating, which is cable of fabricating complicated 100 nm wide, 800 nm deep gold slit waveguides with multiple sharp right-angle corners. The process can be extended to volume production manufacturing with minor modifications, thus enabling the fabrication of nanoslit photonic circuits and networks.

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Powered by OpenAIRE graph
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Average
Average
Average
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