
doi: 10.1116/1.3013398
Metallic nanoslit waveguides are promising candidates for ultrahigh-density optical interconnections. A variety of devices based on metallic nanoslit waveguides have already been proposed that show a great superiority over conventional photonic devices for compactness. However very few two-dimensional devices have been experimentally demonstrated with in-plane geometries due to fabrication difficulties. In this article, a feasible process is presented using traditional semiconductor fabrication technologies such as mix-and-match lithography and electroplating, which is cable of fabricating complicated 100 nm wide, 800 nm deep gold slit waveguides with multiple sharp right-angle corners. The process can be extended to volume production manufacturing with minor modifications, thus enabling the fabrication of nanoslit photonic circuits and networks.
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 3 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |
