Innovative types of actuators are required for several applications, especially in the field of medicine, robotics and micro-systems. In this context, Electroactive Polymers represent a promising group among all smart materials. They can change their dimensions and shape when an external voltage is applied, and their mechanical flexibility and ease of processing offer advantages over traditional electroactive materials expanding the options for different mechanical configurations. Dielectric elastomers are among the most promising EAPs for many applications, including actuators and sensors for the microfactory: they work in a dry environment, can achieve great deformations and support high voltage. They can be represented by a parallel plate capacitor: under an electric field the elastomer is squeezed in the thickness causing expansion in the transverse direction. Dielectric EAP actuators require large electric fields (hundreds of kV/mm) but can produce very large strain (up to 400%). Due to their unique properties and potential applications, in this paper the study of the electromechanical behaviour of a dielectric elastomer and a possible application related with the microfabrication of hybrid microsystem is presented.