Powered by OpenAIRE graph
Found an issue? Give us feedback
addClaim

6K-3 Super Low Velocity Thin Film Gratings/Piezoelectric Substrate Structure with High Reflectivities and Applications for SAW Resonator Filters, Unidirectional SAW Transducers and Bulk Acoustic

Authors: K. Yamanouchi; Y. Satoh;

6K-3 Super Low Velocity Thin Film Gratings/Piezoelectric Substrate Structure with High Reflectivities and Applications for SAW Resonator Filters, Unidirectional SAW Transducers and Bulk Acoustic

Abstract

In this paper, the propagation characteristics and reflectivities of TeO2 grating/128deg Y-X LiNbO3, 36deg Y-X LiTaO3 and 5deg Y-X LiNbO3 are analyzed and applied to resonators, conventional and dispersive unidirectional transducers and solidary mounted bulk wave resonators. Theoretical results of thin film gratings show the large reflectivity, for examples, thin film gratings gives r = 0.95 at the thickness of H/lambda = 0.01, for 128deg Y-X LiNbO3. The experimental results of IDT resonator of thin film (H/lambda= 0.01)/Al/128deg Y-X LiNbO3 with N = 80,W = 20 lambda have admittance of -5 dB, compared with -14 dB without thin films. The experimental unidirectional transducer filter using thin film (H/lambda = 0.015)/Al/128deg Y-X LiNbO3 showed the 1.6 dB insertion loss at 500 MHz without matching. Also flat wide band low loss nondispersive filter characteristics are developed using dispersive unidirectional IDT. Finally, thin film bulk acoustic wave resonator (SMR) of ZnO/W/TeO2 thin film//W/TeO2 thin film/Si substrate structure showed the 30 dB at resonance and -60 dB at anti-resonance

Related Organizations
  • BIP!
    Impact byBIP!
    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    1
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Average
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Average
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
Upload OA version
Are you the author of this publication? Upload your Open Access version to Zenodo!
It’s fast and easy, just two clicks!