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Solutions to Multiple Probing Challenges for Test Access to Multi-Die Stacked Integrated Circuits

Authors: Erik Jan Marinissen; Ferenc Fodor; Arnita Podpod; Michele Stucchi; Yu-Rong Jian; Cheng-Wen Wu;

Solutions to Multiple Probing Challenges for Test Access to Multi-Die Stacked Integrated Circuits

Abstract

Multi-die stacked ICs are getting increasing traction in the market, fueled by innovations in wafer processing technologies (e.g., vertical inter-die and intra-die connections), stack assembly, and advanced packaging approaches (e.g., wafer-level packaging). Given the non-perfect nature of their manufacturing processes, these stacked ICs (SICs) need all to be individually tested for manufacturing defects in an effective, yet efficient manner. This paper discusses a handful of probing challenges specific to such SICs and their solutions: probing ultra-thin wafers on a flexible tape on extra-large tape frames, probing on large arrays of dense micro-bumps, analyzing probe-to-pad alignment (PTPA) accuracy contributions from probe station and probe card on the basis of probe mark images, and efficient auto-correction of individual misalignments of singulated dies or die stacks on tape. The paper concludes with a real-life case study, in which most of the discussed challenges and solutions are combined.

Country
Netherlands
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    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Top 10%
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
8
Top 10%
Top 10%
Top 10%
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