
Multi-die stacked ICs are getting increasing traction in the market, fueled by innovations in wafer processing technologies (e.g., vertical inter-die and intra-die connections), stack assembly, and advanced packaging approaches (e.g., wafer-level packaging). Given the non-perfect nature of their manufacturing processes, these stacked ICs (SICs) need all to be individually tested for manufacturing defects in an effective, yet efficient manner. This paper discusses a handful of probing challenges specific to such SICs and their solutions: probing ultra-thin wafers on a flexible tape on extra-large tape frames, probing on large arrays of dense micro-bumps, analyzing probe-to-pad alignment (PTPA) accuracy contributions from probe station and probe card on the basis of probe mark images, and efficient auto-correction of individual misalignments of singulated dies or die stacks on tape. The paper concludes with a real-life case study, in which most of the discussed challenges and solutions are combined.
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 8 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Top 10% | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Top 10% | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Top 10% |
