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Practical application of energy consumption ratio test

Authors: Eric Peterson; Wanli Jiang;

Practical application of energy consumption ratio test

Abstract

Dynamic I/sub dd/ test techniques are obtaining more attention from both academia and industry, because of their ability to further improve product quality beyond tests based primarily on I/sub ddq/ test and other traditional test techniques. Normal process variations in wafer fabrication decrease the defect coverage and affect the application of dynamic I/sub dd/ test techniques. Energy Consumption Ratio (ECR) test, a recent test metric based on dynamic currents, shows its tolerance to process variations, over other dynamic test techniques. We investigate this technique as a method of providing additional test coverage to production wafers that were fabricated using two different planarization technologies. One set was fabricated with a Spin-on-Glass (SOG) planarization technology, and the other set with Chemical Mechanical Polishing (CMP). The SOG wafers used in our experiments contain defects known as "poisoned vias." We show that the ECR is effective in detecting defects of this type where other traditional test methods are not.

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    influence
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
8
Average
Top 10%
Top 10%
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